Course Overview
This 2 day course is designed to give maintenance technicians the training needed to perform preventive maintenance. After completing this course, the student should be able to maintain the systems mechanical performance. The information given will provide the student with a clear understanding of each of the control chassis and hands on training.
Course Topics
Introduction
- Course objectives
- Detailed overview of the main body and rack
- Safety information
Preventative Maintenance
- Cleaning, greasing and adjusting the leadscrews
- Cleaning and lubrication of the ARL/PRL
- Cleaning and lubrication of the wafer loader
- Changing the HG lamp
- Uniformity check
- Integrator Adjustment
- Service reticle alignment signals and theory of operation
- Service wafer alignment signals and theory of operation
- Service autofocus alignment signals and theory of operation
- Checking and adjusting wafer flatness
- System sensor adjustments
- VIT Leveling
- Water filter change
- Utilities checks and N2 filter changes
- Floppy disk drive head cleaning
- Overview of the various phototest
Tool Software
- The use of tool software for routine maintenance
Error Handling & Corrective Action
- Reticle load errors
- Stage errors
- Wafer processing errors