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EPT is the oldest 3rd party service provider for Nikon steppers in the world! In addition to full service and parts support, we can help you with high quality upgrades. We can also help you with custom projects. Just Ask!

 

 

 
 

June 2009

EPT is announcing wafer coat services and expose/develop services for university labs, R&D environments and new process development. Go to our Services page for details.

05/01/2009

To diversify and provide a more complete level of service to our customers, EPT is expanding its used semiconductor equipment brokerage services.  EPT will now be a source for all photolithography semiconductor equipment. Tools will be available from other processes as well. AS-IS and full refurb and install packages available.  Please contact us for details.

05/01/2009

EPT has completed development on a Substrate Independent Wafer loader Modification. We have a sensor/electronic modification that will allow the same wafer loader setup to run opaque, semi-transparent, and clear wafers without any change in setup or flatfind signals.

08/15/2007

EPT releases new CCU camera replacement system for NSR Body 6 through 10 steppers. This unit is configurable for 3 or 4 camera systems. Demos are available.

04/15/2007

Custom 6" chuck completed for S202 series steppers. Wafer size retrofits available.

10/1/2006

Cleanroom expansion completed for DUV Scanner systems. EPT can now install and completely refurbish your S202, S203, S302 or other DUV Excimer systems in-house.

04/22/2003

Equipment list updated with many more available steppers. See the list here.

01/01/2003

New product announcements for Board testing, PDP SCSI upgrades, and PDP I/O replacement board for modern hard drives.

12/17/2001

Current inventoried equipment list added.  EPT has a large stock of semiconductor manufacturing and test equipment for sale. See the list here.

12/15/2001

New web page released.  Website has been updated to reflect current business practices and new business information.

9/1/2001

New facility opened.  EP Technologies has built a new and larger space to house equipment, office, and clean room facilities.  This building will allow us to service more equipment simultaneously which will increase output and will decrease lead times for refurbishments and repairs.  The main building has over 10,000 sq ft including a 3500 sq ft clean room for equipment work and training.

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